Thin-film lithium niobate electro-optic isolator fabricated by photolithography assisted chemo-mechanical etching.

We report an electro-optic isolator fabricated on thin-film lithium niobate by photolithography-assisted chemo-mechanical etching that shows an isolation of 39.50 dB and an overall fiber-to-fiber loss of 2.6 dB.

Real-time spectroscopic monitoring of continuous-flow synthesis of zinc oxide nano-structures in femtosecond laser fabricated 3D microfluidic microchannels with integrated on-chip fiber probe array.

Materials synthesis in a microfluidic environment enables the flexible and controllable production of various types of nanostructures which are of great potential in the fields of chemistry, environmental science, bioengineering, and medicine. Here, we demonstrate on-chip simultaneous continuous-flow synthesis and in situ spectrum diagnosis of zinc oxide (ZnO) nanomaterials using a femtosecond-fabricated three-dimensional (3D) microchannel reactor integrated with an array of optical fiber probes. The microchannel reactor including 3D concentration gradient generators followed by 3D micromixing units provides high-efficiency manipulation of reactants with different concentrations as well as parallel reaction dynamics in an autonomous manner. The integrated optical fiber probe array allows precise and parallel spectroscopic detection in different microchannels with high spatial and temporal resolutions for screening the synthetic conditions. The synthesized ZnO nanostructures can be tailored in size, shape, and morphology by tuning the flow rates and reactant concentrations based on the spectroscopic signals detected with the fiber probe array.

High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE).

Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary interconnection industries and disruptive applications. Here, we demonstrated the design and fabrication of a high performance thin-film LN EO modulator using photolithography assisted chemo-mechanical etching (PLACE) technology. Our device shows a 3-dB bandwidth over 50 GHz, along with a comparable low half wave voltage-length product of 2.16 Vcm and a fiber-to-fiber insertion loss of 2.6 dB. The PLACE technology supports large footprint, high fabrication uniformity, competitive production rate and extreme low device optical loss simultaneously, our result shows promising potential for developing high-performance large-scale low-loss photonic integrated devices.

On-chip microdisk laser on Yb3+-doped thin-film lithium niobate.

We demonstrate an on-chip Yb3+-doped lithium niobate (LN) microdisk laser. The intrinsic quality factors of the fabricated Yb3+-doped LN microdisk resonator are measured up to 3.79×105 at a 976 nm wavelength and 1.1×106 at a 1514 nm wavelength. The multi-mode laser emissions are obtained in a band from 1020 to 1070 nm pumped by a 984 nm laser and with the low threshold of 103µW, resulting in a slope efficiency of 0.53% at room temperature. Furthermore, both the second-harmonic frequency of pump light and the sum frequency of the pump light and laser emissions are generated in the on-chip Yb3+-doped LN microdisk, benefiting from the strong χ(2) nonlinearity of LN. These microdisk lasers are expected to contribute to the high-density integration of a lithium niobate on insulator-based photonic chip.

Electro-optically tunable microring laser monolithically integrated on lithium niobate on insulator.

We demonstrate monolithic integration of an electro-optically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching, and the pump laser is evanescently coupled into the erbium (${\rm{E}}{{\rm{r}}^{3 +}}$)-doped lithium niobate (LN) microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as ${1.54} \times {{1}}{{{0}}^5}$ at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser. Finally, tuning of the laser wavelength is achieved by varying the electric voltage on the microelectrodes fabricated in the vicinity of a microring waveguide, showing an EO coefficient of 0.33 pm/V.

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding.

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker's transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 × 0.5 mm2, enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.